Heat Transfer Fluids
Because of its extremely low global warming potential (GWP) and wide liquid range (-100°C to 130°C), Novec fluid 7500 can help wafer fabs meet voluntary emission reduction goals.
The fluid can be used in a wide range of thermal management applications, including:
- Ion implanters
- Dry etchers
- CVD/PECVD tools
- Automated test equipment (ATE)
- Electronic component testing and calibration
- Reactors
- Freeze dryers
- Fuel cells
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