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3M™ Diamond Pad Conditioner A165P, 4.25 inch Diameter

3M ID  XA006703038     
3M(TM) Diamond Pad Conditioner A165P, 4.25 in diam
3M(TM) Diamond Pad Conditioner A165P, 4.25 in diam
Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.
Features and Benefits
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
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    Product Attributes

     Abrasive Material‎ Nickel based alloy with patterned diamond‎
     Abrasive Working Surface‎ Full Face‎
     Aggressiveness‎ 15-19‎
     Application‎ CMP‎
     Carrier Color‎ Gray‎
     Carrier Format‎ Disk - with bevel edge‎
     Carrier Size‎ 4.25 inch diameter‎
     Carrier Substrate‎ 304 SS‎
     CMP Process‎ Cu (bulk)‎ ,  PMD/ILD‎ ,  STI Process‎ ,  W (bulk)‎
     Diamond Size‎ 251 um‎
     Diamond Type‎ Type 4, semi-sharp‎
     Manufacturing Location‎ Singapore‎
     Product Series‎ A165P‎
     Product Type‎ Diamond Pad Conditioner‎


    Data Sheet

    Product Disclaimer

  • Use of pad conditioners in process is pad dependent. Additional processes may be supported, contact 3M lab to verify product recommendations.
  • The technical information and data shown on this page should be considered representative or typical only and should not be used for specification purposes.
  • 3M products shown on this website may not be available in all geographic regions or may not be available at this time. Please contact your local sales representative to determine product availability.