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3M™ CMP Fixed Abrasive P7100 Sub Pad

3M ID  AM000003773     
3M(TM) Fixed Abrasive for CMP
3M(TM) Fixed Abrasive for CMP
3M(TM) Fixed Abrasive for CMP
The 3M™ Fixed Abrasive P7100 sub pad provides improved process performance and stability matched to the extended life of 3M's fixed abrasive rolls. This enables improved process performance, minimized consumable changes and reduced tool downtime.
Features and Benefits
  • Outstanding planarization
  • Exceptional within-die range
  • Low defects
  • Stable repeatable process
  • Wide process window
  • Reduced step height
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    Product Attributes

    Product SeriesP7100

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