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3M™ CMP Fixed Abrasive Oxide Roll SWR550.1

3M ID  AM000003781     
3M(TM) Fixed Abrasive for CMP
3M(TM) Fixed Abrasive for CMP
3M(TM) Fixed Abrasive for CMP
3M™ Fixed Abrasive CMP products consist of ultra-fine ceria particles, dispersed in a resin binder and patterned with a precise micro replicated surface. This surface is optimized for process stability, fluid transport and long abrasive life.
Features and Benefits
  • Outstanding planarization
  • Exceptional within-die range
  • Low defects
  • Stable repeatable process
  • Wide process window
  • Reduced step height
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    Overview

    Product Attributes

    Product SeriesSWR550.1

    Product Disclaimer

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