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3M™ Chemicals for Electronics Markets

Semiconductor


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3M offers a broad line of 3M™ Novec™ Engineered Fluids and Electronic Surfactants that have been designed for differentiating performance in semiconductor manufacturing. Novec products are useful in processes ranging from buffered-oxide-etch mixtures to non-damaging photoresist strip; and fluoropolymer residue removal and advanced wafer drying to heat transfer fluids for wafer platen temperature control. The short atmospheric lifetimes and low global warming potentials of Novec fluids offer semiconductor manufacturers an effective means to replace greenhouse gases such as PFCs and HFCs, enabling a significant reduction in their carbon footprint.



Wafer Cleaning

The low surface tension, low viscosity, and fast evaporation rate make the 3M™ Novec™ Engineered Fluids particularly effective in drying hydrophobic and high aspect ratio structures. In addition, the solubility for fluoropolymer residues facilitates efficient post-etch contaminant removal during MEMS and Through-Silicon-Via (TSV) fabrication. When blended with co-solvents, Novec fluids can effectively remove photoresist from water-sensitive substrates common to Cu/low-k devices. 3M has developed a proprietary recycling technology to provide a cost competitive solution in both liquid and vapor phase cleaning equipment.

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Heat Transfer

In semiconductor heat transfer applications, 3M™ Novec™ Engineered Fluids offer a balance high dielectric heat transfer performance with favorable environmental and worker safety properties to deliver the safe, reliable thermal management you demand. Thermal management issues are becoming increasingly important to semiconductor manufacturers and new designs put more demands on the dielectric fluids used to maintain proper temperatures. In addition, environmental issues have become a critical factor in fab operating decisions. In short, selection of a heat transfer fluid for your semiconductor processing can no longer be an afterthought. The sustainable, high performance properties of Novec fluids are needed.

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Surfactants

3M™ Novec™ Electronic Surfactants are perfluorobutylsulfonate-based (PFBS) surfactants. Based on toxicity and life cycle testing, 3M characterizes these materials as a sustainable technology. These surfactants are very effective and stable surface tension lowering agents in a variety of aqueous, acidic and alkaline systems. In many cases only 100ppm active Novec surfactant is required to lower surface tension to less than 22 dynes/cm. 100mL trial samples are available for evaluation.

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Semiconductor Cleaning

3M™ Novec™ 7100 Engineered Fluid
3M™ Novec™ 7100DL Engineered Fluid
3M™ Novec™ 71DE Engineered Fluid
3M™ Novec™ 71DA Engineered Fluid
3M™ Novec™ 71IPA Engineered Fluid
3M™ Novec™ 7200 Engineered Fluid
3M™ Novec™ 7200DL Engineered Fluid
3M™ Novec™ 72DE Engineered Fluid
3M™ Novec™ 72DA Engineered Fluid
3M™ Novec™ 7300 Engineered Fluid
3M™ Novec™ 7500 Engineered Fluid
3M™ Novec™ 7600 Engineered Fluid

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